Client Background
A fabless semiconductor company outsourcing its advanced node chip production. Their existing cleanroom could not meet the stringent vibration and air purity requirements for 193nm immersion lithography, causing yield loss.
Needs & Challenges
· ISO Class 5 (Class 100) at the wafer surface.
· Tight temperature control: 22 ± 0.1°C across the photolithography bay.
· Short downtime: Only 1 month available to retrofit the existing bay.
Solution
· Mini‑environment design: Isolated the stepper with fan‑filter units (FFU) plus chemical filters for AMC. Achieved ISO 4 inside the tool envelope.
· Active vibration isolation: Concrete inertia block + pneumatic isolators to meet VC‑D criteria.
· High‑accuracy HVAC: Dual chilled water loops with reheat, plus variable air volume (VAV) terminals. Temperature uniformity measured at ±0.08°C.
· Prefabricated panels: Off‑site manufactured stainless steel panels with cam‑lock joints. Installed during a planned maintenance shutdown – completed in 25 days.
Client Feedback
“Yaning understood our tool requirements better than other cleanroom contractors.”
— Facility Manager, Semiconductor Client
Summary
Yaning specializes in the field of cleanroom engineering. We are dedicated to creating clean production environments that directly enhance manufacturing efficiency. Our modular solutions represent an ideal choice for clean production zones within the manufacturing sector.
